Cov tshuaj-mechanical polishing (CMP) feem ntau koom nrog kev tsim cov chaw du los ntawm cov tshuaj tiv thaiv tshuaj, tshwj xeeb tshaj yog ua haujlwm hauv kev lag luam ntawm semiconductor manufacturing.Lonnmeter, ib tug ntseeg innovator nrog ntau tshaj 20 xyoo ntawm kev txawj ntse nyob rau hauv inline concentration ntsuas, muaj lub xeev-of-the-artnon-nuclear density metersthiab viscosity sensors los daws cov teeb meem ntawm kev tswj slurry.
Qhov tseem ceeb ntawm Slurry Quality thiab Lonnmeter's Expertise
Cov khoom siv tshuaj lom neeg polishing slurry yog cov pob txha ntawm cov txheej txheem CMP, txiav txim siab qhov sib xws thiab qhov zoo ntawm qhov chaw. Qhov tsis sib xws slurry ntom lossis viscosity tuaj yeem ua rau muaj qhov tsis xws luag xws li micro-scratches, tshem tawm cov khoom tsis sib xws, lossis cov ntaub qhwv txhaws, cuam tshuam wafer zoo thiab nce nqi ntau lawm. Lonnmeter, tus thawj coj thoob ntiaj teb hauv kev ntsuas kev daws teeb meem, tshwj xeeb hauv inline slurry ntsuas kom ntseeg tau tias kev ua haujlwm zoo slurry. Nrog cov ntaub ntawv pov thawj ntawm kev xa cov kev ntseeg siab, siab-precision sensors, Lonnmeter tau koom tes nrog cov tuam txhab semiconductor los txhim kho cov txheej txheem tswj thiab kev ua haujlwm zoo. Lawv cov non-nuclear slurry density meters thiab viscosity sensors muab cov ntaub ntawv ntawm lub sijhawm tiag tiag, ua kom muaj kev hloov kho meej los tswj cov slurry sib xws thiab ua tau raws li cov kev xav tau nruj ntawm kev tsim khoom niaj hnub semiconductor.
Tshaj li ob xyoo caum ntawm kev paub hauv inline concentration ntsuas, ntseeg siab los ntawm cov tuam txhab semiconductor sab saum toj. Lonnmeter's sensors yog tsim los rau seamless kev sib koom ua ke thiab xoom txij nkawm, txo cov nqi khiav lag luam.Tau cov kev daws teeb meem kom tau raws li cov txheej txheem tshwj xeeb, kom ntseeg tau siab wafer yields thiab ua raws.
Lub luag haujlwm ntawm Tshuaj Mechanical Polishing hauv Semiconductor Manufacturing
Chemical mechanical polishing (CMP), tseem hu ua chemical-mechanical planarization, yog lub hauv paus ntawm kev tsim khoom semiconductor, ua rau kev tsim cov chaw tiaj tus, tsis muaj qhov tsis xws luag rau kev tsim cov chips siab heev. Los ntawm kev sib txuas cov tshuaj etching nrog cov neeg kho tshuab abrasion, CMP txheej txheem xyuas kom meej qhov yuav tsum tau muaj rau ntau txheej sib xyaw ua ke ntawm cov kab hauv qab 10nm. Cov tshuaj lom neeg kho tshuab polishing slurry, muaj li ntawm dej, tshuaj reagents, thiab abrasive hais, interacts nrog polishing ncoo thiab wafer kom tshem tawm cov khoom uniformly. Raws li semiconductor designs evolve, cov txheej txheem CMP ntsib qhov nyuaj, yuav tsum tau nruj tswj ntawm slurry zog los tiv thaiv tsis xws luag thiab ua tiav cov smooth, polished wafers xav tau los ntawm Semiconductor Foundries thiab cov khoom siv.
Cov txheej txheem yog qhov tseem ceeb rau kev tsim 5nm thiab 3nm chips nrog qhov tsis xws luag, uas ua kom cov chaw tiaj tus rau qhov tseeb ntawm cov txheej txheem tom ntej. Txawm tias me me slurry inconsistencies tuaj yeem ua rau raug nqi rov ua haujlwm lossis poob tawm.
Kev sib tw hauv Kev Saib Xyuas Slurry Properties
Kev tswj kom zoo ib yam slurry ceev thiab viscosity nyob rau hauv cov txheej txheem chemical mechanical polishing yog fraught nrog cov teeb meem. Cov khoom siv slurry tuaj yeem sib txawv vim muaj ntau yam xws li kev thauj mus los, dilution nrog dej lossis hydrogen peroxide, kev sib xyaw tsis txaus, lossis tshuaj lom neeg degradation. Piv txwv li, particle tswm rau hauv slurry totes tuaj yeem ua rau ntau dua ntom ntom ntom ntom ntom hauv qab, ua rau tsis muaj-uniform polishing. Cov kev soj ntsuam ib txwm muaj xws li pH, oxidation-txo qhov muaj peev xwm (ORP), lossis cov khoom siv hluav taws xob feem ntau tsis txaus, vim lawv tsis pom cov kev hloov pauv hloov pauv hauv slurry muaj pes tsawg leeg. Cov kev txwv no tuaj yeem ua rau muaj qhov tsis xws luag, txo tus nqi tshem tawm, thiab cov nqi siv tau ntau ntxiv, ua rau muaj kev pheej hmoo loj rau cov tuam txhab khoom siv hluav taws xob semiconductor thiab cov chaw muab kev pabcuam CMP. Kev hloov pauv thaum tuav thiab xa tawm cuam tshuam rau kev ua haujlwm. Sub-10nm nodes xav tau kev tswj nruj dua ntawm slurry purity thiab muab qhov tseeb. pH thiab ORP qhia qhov sib txawv me me, thaum conductivity txawv nrog slurry aging. Cov khoom tsis sib haum slurry tuaj yeem ua rau muaj qhov tsis xws luag txog li 20%, ib qho kev tshawb fawb hauv kev lag luam.
Lonnmeter's Inline Sensors rau Kev Saib Xyuas Lub Sijhawm
Lonnmeter hais txog cov kev cov nyom no nrog nws cov qib siab uas tsis yog-nuclear slurry ntom ntom ntsuas thiabviscosity sensors, suav nrog viscosity meter inline rau hauv-kab viscosity ntsuas thiab ultrasonic ntom ntsuas rau ib txhij slurry ntom thiab viscosity xyuas. Cov sensors no yog tsim los rau seamless kev koom ua ke rau hauv CMP cov txheej txheem, featuring kev lag luam-tus qauv kev sib txuas. Lonnmeter cov kev daws teeb meem muab kev cia siab rau lub sijhawm ntev thiab kev saib xyuas qis rau nws txoj kev tsim kho zoo. Cov ntaub ntawv ntawm lub sijhawm tiag tiag ua rau cov neeg ua haujlwm ua kom zoo-tu slurry blends, tiv thaiv qhov tsis xws luag, thiab ua kom zoo polishing kev ua tau zoo, ua rau cov cuab yeej no tseem ceeb rau kev soj ntsuam thiab kuaj cov khoom siv thiab CMP Consumables Suppliers.
Cov txiaj ntsig ntawm Kev Saib Xyuas Txuas Ntxiv rau CMP Optimization
Kev soj ntsuam tas li nrog Lonnmeter's inline sensors hloov cov txheej txheem tshuaj lom neeg polishing los ntawm kev xa cov kev pom zoo thiab kev txuag nqi tseem ceeb. Real-time slurry ceev ntsuas thiab viscosity xyuas txo qhov tsis xws luag xws li khawb los yog dhau-polishing txog li 20%, raws li kev lag luam benchmarks. Kev koom ua ke nrog PLC system enables automated dosing thiab cov txheej txheem tswj, kom ntseeg tau tias slurry zog nyob rau hauv kev pom ntau yam. Qhov no ua rau 15-25% txo cov nqi siv tau, txo qis qis, thiab txhim kho wafer uniformity. Rau Semiconductor Foundries thiab CMP Cov Chaw Muab Kev Pabcuam, cov txiaj ntsig no txhais tau rau kev tsim cov khoom tsim tau zoo, cov nyiaj tau los ntau dua, thiab ua raws li cov qauv zoo li ISO 6976.
Cov Lus Nug Feem Ntau Txog Kev Saib Xyuas Slurry hauv CMP
Vim li cas slurry density ntsuas qhov tseem ceeb rau CMP?
Slurry density ntsuas xyuas kom meej cov khoom sib faib thiab sib xyaw ua ke, tiv thaiv qhov tsis xws luag thiab ua kom zoo dua cov nqi tshem tawm hauv cov txheej txheem chemical mechanical polishing. Nws txhawb kev tsim cov wafer zoo thiab ua raws li cov qauv kev lag luam.
Yuav ua li cas viscosity xyuas txhim kho CMP efficiency?
Kev saib xyuas viscosity tswj xyuas cov dej ntws zoo ib yam, tiv thaiv cov teeb meem xws li cov ntaub qhwv ntsej muag lossis polishing tsis sib xws. Lonnmeter's inline sensors muab cov ntaub ntawv ntawm lub sijhawm tiag tiag los txhim kho cov txheej txheem CMP thiab txhim kho wafer yields.
Dab tsi ua rau Lonnmeter's non-nuclear slurry density meters tshwj xeeb?
Lonnmeter's non-nuclear slurry density meters muab kev ntsuas ib txhij thiab viscosity nrog qhov raug siab thiab tsis tu ncua. Lawv cov qauv tsim kom muaj kev ntseeg siab hauv kev xav tau CMP txheej txheem ib puag ncig.
Real-time slurry ceev ntsuas thiab viscosity xyuas yog ib qho tseem ceeb rau optimizing cov tshuaj mechanical polishing txheej txheem nyob rau hauv semiconductor manufacturing. Lonnmeter's non-nuclear slurry density meters thiab viscosity sensors muab Semiconductor Equipment Manufacturers, CMP Consumables Suppliers, thiab Semiconductor Foundries nrog cov cuab yeej los kov yeej cov kev sib tw slurry tswj, txo qhov tsis xws luag, thiab txo nqi. Los ntawm kev xa cov ntaub ntawv meej, lub sijhawm tiag tiag, cov kev daws teeb meem no txhim kho cov txheej txheem kev ua tau zoo, ua kom muaj kev ua raws, thiab tsav cov txiaj ntsig hauv kev sib tw CMP kev lag luam. Mus saibLonnmeter lub vev xaiblos yog hu rau lawv pab neeg niaj hnub no kom pom tias Lonnmeter tuaj yeem hloov kho koj li kev siv tshuaj lom neeg polishing li cas.
Post lub sij hawm: Lub Xya hli ntuj-22-2025
